Waferhandling.Product

WHM330X4 | WaferHandlingRobot with 4 end-effectors

WHM330X4 WaferHandlingRobot with 4 end-effectors

For greatest productivity and flexibility

Adenso.Advantages:

PERFORMANCE up to 4 pcs. of endeffectors (!) allow highest thruput

FLEXIBILITY using WAFER, CASSETTES, CARRIERS with the same setup

RANGE Largest travel ranges = maximum flexibility.

Specification

WORKING RANGES
X: up to 2m
Z: 0, 50, 100, (opt. …500) mm

PAYLOAD
starts from 1 kg up to 25 kg

CLEAN ROOM
clean room suitability
up to ISO class 3 / US FED class 1

SAFETY
SBC safe brake control
STC safe tension control

VAKUUM RANGE
base press.: 5x 10-7 mbar
opon: double sealing

INTERFACES
Ethernet, EtherCAT, Profibus

Adenso.Kontakt

+49 351 79 59 79 70

E-Mail: info(at)adenso.de

Adenso Industrial Services GmbH
Adenso GmbH
Zur Wetterwarte 27
01109 Dresden
Germany

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