Waferhandling.Product
VAC.CRYO Handling system for cryo testing station
World’s first: STEALTH-CARRIER / Presentation at SEMICON 2018, Munich
STEALTH CARRIER for CRYOGENE environment
The carrier has virtually no heat signature and is therefore particularly well suited for environments with liquid gas such as helium up to 4.2 K
For all kinds of substrates:
- 300/200/150/100/50 mm wafers
- Glass/ceramic/sapphire substrate
- Devices/chips/ …