Waferhandling.Product

VAC.CRYO Handling system for cryo testing station

World’s first: STEALTH-CARRIER / Presentation at SEMICON 2018, Munich

STEALTH CARRIER for CRYOGENE environment

The carrier has virtually no heat signature and is therefore particularly well suited for environments with liquid gas such as helium up to 4.2 K

For all kinds of substrates:

  • 300/200/150/100/50 mm wafers
  • Glass/ceramic/sapphire substrate
  • Devices/chips/ …