Waferhandling.Product
STEALTH CARRIER
World’s first: STEALTH-CARRIER
STEALTH CARRIER thermally almost invisible carrier for cryogenic environment
The carrier has virtually no heat signature and is therefore particularly well suited for environments with liquid gas such as helium up to 4.2 K
For all kinds of substrates:
- 300/200/150/100/50mm wafers
- Glass, ceramic, saphir substrate,
- Devices, single chips, …
The invisible cryogenic Adenso.Solution
Enter new markets!
pdf.download
Specification
SUBSTRATE TYPES
– WAFER 50 … 450mm
– pieces
– single chips
– devices
– …
PAYLOAD
Standard: up to 1kg
Adenso.Advantages:
THERMAL INVISIBILITY ideally suited for LHe/LN2—environments
MINIMUM THERMAL MASS fast heang/cooling
CONTACT SURFACES FOR TEMPERATURE CONTROL heang and cooling to shielding temperature
SUBSTRATES wafer 50…450mm, pieces, devices, …
MAGAZINES customized magazines for load lock modules
