Waferhandling.Product

STEALTH CARRIER

World’s first: STEALTH-CARRIER

STEALTH CARRIER thermally almost invisible carrier for cryogenic environment

The carrier has virtually no heat signature and is therefore particularly well suited for environments with liquid gas such as helium up to 4.2 K

For all kinds of substrates:

  • 300/200/150/100/50mm wafers
  • Glass, ceramic, saphir substrate,
  • Devices, single chips, …

The invisible cryogenic Adenso.Solution
Enter new markets!

Specification

SUBSTRATE TYPES
– WAFER 50 … 450mm
– pieces
– single chips
– devices
– …

PAYLOAD
Standard: up to 1kg

Adenso.Advantages:

THERMAL INVISIBILITY ideally suited for LHe/LN2—environments

MINIMUM THERMAL MASS
fast heang/cooling

CONTACT SURFACES FOR TEMPERATURE CONTROL
heang and cooling to shielding temperature

SUBSTRATES
wafer 50…450mm, pieces, devices, …

MAGAZINES
customized magazines for load lock modules

Adenso.Kontakt

+49 351 79 59 79 70

E-Mail: info(at)adenso.de

Adenso Industrial Services GmbH
Adenso GmbH
Zur Wetterwarte 27
01109 Dresden
Germany

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