The LLM330 LoadLockModule is a customized designed carrier stocker system for research and production use.
Based on a vertical stroke unit the LLM330 LoadLockModule allows continuous substrate handling for continuous processing.
Cluster systems, equipped with LLM330 Load Lock Module allow fully automated load and unload of a large number of substrates.
- Newest technologies are built in
- compact and stable design
- low initial costs
- user friendly
- various configuration options
- high reliability
- high productivity
- ready for use at once
- ergonomic design
- assistance by integration into your existing equipment
The LLM-VAC Load Lock Module is a custom-designed carrier stocker system for use in research and production.
Based on a vertical stroke unit, the LLM-VAC Load Lock Module allows continuous substrate handling for continuous processing.
Cluster systems equipped with the LLM-VAC Load Lock Module enable fully automated loading and unloading of a large number of substrates.
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