Wafer&Cluster.Product

LLM330 | VAC-LoadLockModule

The LLM330 LoadLockModule is a customized designed carrier stocker system for research and production use.

Based on a vertical stroke unit the LLM330 LoadLockModule allows continuous substrate handling for continuous processing.

Cluster systems, equipped with LLM330 Load Lock Module allow fully automated load and unload of a large number of substrates.

Adenso.Advantages

  • Newest technologies are built in
  • compact and stable design
  • low initial costs
  • user friendly
  • various configuration options
  • high reliability
  • high productivity
  • ready for use at once
  • ergonomic design
  • assistance by integration into your existing equipment

The LLM-VAC Load Lock Module is a custom-designed carrier stocker system for use in research and production.
Based on a vertical stroke unit, the LLM-VAC Load Lock Module allows continuous substrate handling for continuous processing.
Cluster systems equipped with the LLM-VAC Load Lock Module enable fully automated loading and unloading of a large number of substrates.
Let’s start to lower your production costs together and maximise the return on your assets: Adenso – solutions you need.

Adenso.Kontakt

+49 351 79 59 79 70

E-Mail: info(at)adenso.de

Adenso Industrial Services GmbH
Adenso GmbH
Zur Wetterwarte 27
01109 Dresden
Germany

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