Newest technologies are built in compact and stable design low initial costs user friendly various configuration options high reliability high productivity ready for use at once ergonomic design assistance by integration into your existing equipment
The LLM-VAC Load Lock Module is a custom-designed carrier stocker system for use in research and production. Based on a vertical stroke unit, the LLM-VAC Load Lock Module allows continuous substrate handling for continuous processing. Cluster systems equipped with the LLM-VAC Load Lock Module enable fully automated loading and unloading of a large number of substrates. Let’s start to lower your production costs together and maximise the return on your assets: Adenso – solutions you need.
sinusoidal movement profiles
special carrier solutions: with in-situ measurement, high temperature version, active heated carrier
different cassette types available
integrated valve to handling chamber
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Adenso Industrial Services GmbH Adenso GmbH Am Weiher 3 OT Boxdorf / Dresden 01468 Moritzburg, Germany