LLM230 | LoadLock Module
The LLM-VAC Load Lock Module is a custom-designed carrier stocker system for use in research and production.
Based on a vertical stroke unit, the LLM-VAC Load Lock Module allows continuous substrate handling for continuous processing.
Cluster systems equipped with the LLM-VAC Load Lock Module enable fully automated loading and unloading of a large number of substrates.
Let’s start to lower your production costs together and maximise the return on your assets: Adenso – solutions you need.
Newest technologies are built in
compact and stable design
low initial costs
various configuration options
ready for use at once
assistance by integration into your existing equipment
- precision guides
- dynamic drives
- sinusoidal movement profiles
- robust construction
- compact design
- special carrier solutions: with in-situ measurement, high temperature version, active heated carrier
- different cassette types available
- integrated valve to handling chamber