Wafer&Cluster.Product

LLM230 | Load Lock Module

 Benefits:

Newest technologies are built in
 compact and stable design
 low initial costs
 user friendly
 various configuration options
 high reliability
 high productivity
 ready for use at once
 ergonomic design
 assistance by integration into your existing equipment

The LLM-VAC Load Lock Module is a custom-designed carrier stocker system for use in research and production.
Based on a vertical stroke unit, the LLM-VAC Load Lock Module allows continuous substrate handling for continuous processing.
Cluster systems equipped with the LLM-VAC Load Lock Module enable fully automated loading and unloading of a large number of substrates.
Let’s start to lower your production costs together and maximise the return on your assets: Adenso – solutions you need.

Standard version

  • precision guides
  • dynamic drives
  • sinusoidal movement profiles
  • robust construction
  • compact design

Options

  • special carrier solutions: with in-situ measurement, high temperature version, active heated carrier
  • different cassette types available
  • mapping
  • integrated valve to handling chamber

Adenso.Kontakt

+49 351 79 59 79 70

E-Mail: info(at)adenso.de

Adenso Industrial Services GmbH
Adenso GmbH
Zur Wetterwarte 27
01109 Dresden
Germany

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