FOUP300 VAC-LoadPort

  • Saves 80% of space

  • The blue Adenso.Solution

    Saves investment and operating costs as well

FOUP300-VAC | Load Port

For loading 300 mm wafers into cluster systems directly and without (!) atmospheric handling robots

The complete handling module with two FOUP300-VAC Load Ports is located inside the area marked in blue.

Current solutions require the entire area marked in grey as well as atmospheric robot handling, which not only takes up space, but involves investment costs and running operating costs.

Adenso.Solution: Smart with a small footprint and a lot of advantages for Adenso clients

  • higher productivity
  • more space
  • optimised costs
  • greater flexibility
  • progressive products
  • new markets

NEW: Adenso.Solution

Saves up to 80% of floor space

Saves investment and operating costs for unnecessary tools