DTS220X – Device Tester Sorter | Carrier and Wafer Sorter | Wafer Stocker
The DTS machine optimises your substrate handling by automatically sorting substrates from standard and/or customised wafer boxes to special carriers/cassettes/magazines, which are used in high-vacuum and inert gas environments, for example in vacuum cluster systems.
Suitable for substrates up to 200 mm. Flexible combination of different cassette types.
Customised integration of all kinds oft test equipment, such as ID reader, vision systems, alignment.
Productivity: Up to 4 pcs. of end-effectors and up to 6 pcs. of cassette lifts guarantee the highest throughput, e.g. 180 wafers/hour (dep. on meas. time)
Layout: Dimensions of the DTS machine in basic configuration: 2,377 x 1,744 mm
Datasheet Device Tester Sorter – download