Wafer&Cluster.Product

DTS220X | Device Tester Sorter | Carrier and Wafer Sorter

Technical data

Operating ranges:
X: up to 1 m
Z: 0.50, 100 mm
R: 360°

Load:
Standard: up to 1 kg
Heavy duty: up to 5 kg

Cleanroom:
Cleanroom suitable up to ISO class 3 / US FED class 1
Optional FFU filter unit for microclimate.

Safety:
Smooth running and STOP control integrated as standard.
Certified safety technology integrated in the moon control system for servo drives:
SBC safe brake control
STC safe tension control

Interfaces:
Ethernet
EtherCAT
Profibus

All Adenso Products are developed and produced by Adenso in Dresden. Made in Sachsen, Germany.
The Silicon Saxony is one of Europe’s most successful trade association for the semiconductor industries.

DTS220X – Device Tester Sorter | Carrier and Wafer Sorter

The DTS machine optimises your substrate handling by automatically sorting substrates from standard and/or customised wafer boxes to special carriers/cassettes/magazines, which are used in high-vacuum and inert gas environments, for example in vacuum cluster systems.

Suitable for substrates up to 200 mm. Flexible combination of different cassette types.

Customised integration of all kinds oft test equipment, such as ID reader, vision systems, alignment.

Productivity: Up to 4 pcs. of end-effectors and up to 6 pcs. of cassette lifts guarantee the highest throughput, e.g. 180 wafers/hour (dep. on meas. time)

Layout: Dimensions of the DTS machine in basic configuration: 2,377 x 1,744 mm

Datasheet download.pdf

Adenso.Advantages

CUSTOMISED CASSETTES
Unlimited cassette types = user friendly and versatile.

RANGE
Largest travel ranges = maximum flexibility.

PAYLOAD
Highest load capacity = unlimited substrate choice.

FOOTPRINT
Space-saving kinematics = small setup area.

COMPLEXITY
Keep it simple with Adenso = save space and money!

Adenso DTS220X TESTER

Advanced Handling Solutions for Substrate, Carrier, Magazine

Adenso DTS220X TESTER

  • TESTER: based on Device Tester Sorter platform DTS220X
  • integration of testing procedures and customer processes
  • customer-specific substrates, carriers, magazines
  • substrate alignment
  • vision systems
  • ID reader

Adenso.Kontakt

+49 351 79 59 79 70

E-Mail: info(at)adenso.de

Adenso Industrial Services GmbH
Adenso GmbH
Zur Wetterwarte 27
01109 Dresden
Germany

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