Wafer&Cluster.Product
adLOAD | advanced High Capacity LoadLock Module
adLOAD for high substrate capacity
adLOAD forms a completely new category of LoadLock.Modules for cluster systems, which is characterized by a previously unattained substrate.capacity.
Instead of the previous only 25 wafers per cycle, 30, 40, 50 wafers and more can now be accommodated in a LoadLock –an enormous increase in the autonomy time with the same footprint!
All options and combination options known from the VAC.ROBOTICS platform, such as Alignment, multi substrate gripper, temperature control, … are compatible with this series.
As is typical for Adenso, the adLOADs can also be configured for sizes with a substrate size of 200 and 300mm.
Combined with the 7port central platform, it offers future-proof flexibility for all applications.
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Adenso.Advantages
- Newest technologies are built in
- compact and stable design
- low initial costs
- user friendly
- various configuration options
- high reliability
- high productivity
- ready for use at once
- ergonomic design
- assistance by integration into your existing equipment