Master-interface for Adenso Robot.Platform

adControl | Cluster Control System

Modular & stand-alone central handling system,
with vacuum process control,
recipe management, visualisation,
scheduler and multi-admin.

Expandable modules, stand-alone, Hardware-independent, reliable.

Communication with the customer’s process control system takes place securely via the Adenso.Interface.

This adControl setup is based on the Adenso waferhandling hardware platform and covers the necessary effort for setting up a fully operational stand-alone central handling unit.

The advantage of adControl:

This central system can be setup in parallel to the setting up and commissioning of the process modules – this saves time and guarantees smooth integration – a stable foundation for process commissioning by the customer.

  • adControl a typical Adenso.Solution

    In talk with: Uwe Beier, managing director of Adenso

On which competences do our customers wish to focus?

Process technologies and nothing else! This means that our customers need central Robot.Modules to connect process modules in a cluster in order to handle substrates between the processes and to feed them in/out.

What does the ideal central handling module look like from the customer perspective?

It is a fully independent central Cluster.Module with an intuitively operated graphical user interface and all the necessary safety functions.

How can Adenso fulfil this customer requirement?

This is why we developed the modular Adenso Robot.Platform. The Robot.Modules are modularly configured in an application-specific manner – almost as easily as creating something with certain well-known toy bricks! The equally modular Cluster.Control system adControl is responsible for the entire control of the central handling module.

How is a Robot.Cluster for vacuum processes created?

The process provider has the technologies and devises a configuration for its customer. Adenso selects a suitable Robot.Platform and the necessary Robot.Modules and configures a Robot.Cluster together with the adControl. The communication between the Handling.Robot and the Process.Modules takes place via the adControl.Interface and in a simple and equally modular manner.

How long does the basic commissioning of Handling.Robots and Process.Modules take?

Since all systems are commissioned in parallel and independently of one another and the interface can be tested in advance, the basic commissioning of even extensive cluster systems is generally completed within just one day. The process can then be commissioned immediately.

What is the sales concept behind adControl?

Since we use a licensing model for adControl, our customers don’t need to pay for the entire software development for each project. This means significant savings in terms of time (because it’s a ready-made standard product) and costs (just the licence fee).


Adenso Robot.Platform with adControl

  • adControl

    Stand alone system, with vacuum process control, visualization, scheduler and multi-admin

  • adControl with

    • electronics
    • pneumatics
    • LLM-VAC
    • LLM-TMP (option)
    • safety equipment
    • multitouch-display

  • adControl

    • electronics
    • vacuum system
    • multitouch-display
    • operating

  • Solution for Adenso Robot.Platform

    The new Cluster Control System

  • Different operating conditions

    Adenso adcontrol Human Machine Interface (HMI)

  • Adenso.Solution: adControl

  • Adenso Robot.Platform with adControl


Configuration example

… of a central handling module WHM with a LoadLockModule LLM (blue)
and potential customer process modules PCS (red):

All the TASKS for Implementation and Production can be defined, commissioned and realised independently of each other and of the client’s Process Control System


• Stand-alone system
• Control hardware and software
• Scheduler (substrate tracking recipes)
• Operator administration
• Visualisation / multi touch display

contains vacuum components, pneumatics, …
• WHM-VAC (wafer handling module)
• LLM-VAC (load lock module)
Process-independent commissioning


• Process technology
• Ideally stand-alone solutions
• Ideally one PLC per process module
Handling-independent commissioning


Operated by customer as stand-alone version or by Adenso as an option: integrated into adControl visualisation (customised solution)


CLUSTER (general, substrates, safety, …)
Basic commissioning together within a short timeframe as a basis for process commissioning by the customer

The basic commissioning of even extensive cluster systems generally takes place within just one day. The process can then be commissioned immediately.

The Adenso VAC.ROBOTICS Platform


Adenso turns your demands into action

The Adenso modular world of Advanced Waferhandling.Solutions: Basic layout + WHRobot + WHModule + Load Module + Specifications + adControl = Results in a product with defined interfaces that is ready for use and tailored to your needs.

Wafers and large-area substrates,load as you need, longest reaches in the market.With adControl HM interface and Tool.Cloud.

The holistic concept of creativity, customer focus, process optimisation and the continuous exchange of experiences constitute the cornerstone of the Adenso corporate philosophy.