LoadLock-Module

The cassette modules take care of loading and special functions

Adenso LoadLock Module (LLM)

Adenso wafer load lock modules (LLM): model variants out of Adenso waferhandling systems | Cluster.Platform

LLM – load lock module – automatic version
Cassette module for holding substrate carriers for adaptation to the WHM-VAC handling module.
Capacities range from 5 pcs to more than 20 pcs. Carrier weights of more than 10 kg per carrier possible!

adLOAD – High Capacity LoadLock Module
adLOAD forms a completely new category, which is characterized by a previously unattained substrate.capacity.
Instead of the previous only 25 wafers per cycle, 50 wafers and more can now be accommodated in a LoadLock.

LLM – load lock module – manual version
Load lock chamber for manual system loading, prepared for adaptation to the WHM-VAC handling module.

LMS – Load lock – mapping
Sensor-based system that enables the inserted carrier cassettes to be scanned.

SCC – substrate carrier cassette
Cassette for holding multiple carriers, optimised for use of the WHR-VAC wafer handling robot.

SCS – substrate carrier system – standard
Customer-specific carriers for holding substrates.

SCS – substrate carrier system – in-situ
Customer-specific carriers with integrated measuring technology.

SCS – substrate carrier system – ACTIVE
Customer-specific carriers with integrated heating elements.

Pre- and Post-Processing.Module
COOLING.Module: Cooling of substrates after thermal processes
HEATING.Module: Heating up substrates as process preparation

ROBOT.Configurator

Wafer Handling Robot

Wafer handling modules

Your business:

Research and production:
• material research
• layer development
• semiconductors
• sensor systems
• optics

FIVE REASONS for choosing Adenso wafer handling

1. RANGE

2. CARRYING CAPACITY

3. BYPASS VALVES

4. SETUP AREA

5. COMPLEXITY

NEW: ROBOT.Configurator

Simply use the ROBOT.Configurator to find the right Cluster.Platform

With the new ROBOT.Configurator, Adenso offers the solution for configuring individual cluster platforms according to application requirements.
The desired system grows in three dimensions and comes at the end with a detailed summary of all parameters as a PDF.
Adenso customers can now configure a wide variety of platform variants easily, quickly and flexibly. Try it out now!

ROBOT.Configurator