Adenso wafer load lock modules (LLM): model variants out of Adenso waferhandling systems | Cluster.Platform
LLM – load lock module – automatic version
Cassette module for holding substrate carriers for adaptation to the WHM-VAC handling module.
Capacities range from 5 pcs to more than 20 pcs. Carrier weights of more than 10 kg per carrier possible!
LLM – load lock module – manual version
Load lock chamber for manual system loading, prepared for adaptation to the WHM-VAC handling module.
LMS – Load lock – mapping
Sensor-based system that enables the inserted carrier cassettes to be scanned.
SCC – substrate carrier cassette
Cassette for holding multiple carriers, optimised for use of the WHR-VAC wafer handling robot.
SCS – substrate carrier system – standard
Customer-specific carriers for holding substrates.
SCS – substrate carrier system – in-situ
Customer-specific carriers with integrated measuring technology.
SCS – substrate carrier system – ACTIVE
Customer-specific carriers with integrated heating elements.
Pre- and Post-Processing.Module
COOLING.Module: Cooling of substrates after thermal processes
HEATING.Module: Heating up substrates as process preparation