Adenso wafer handling modules (WHM): model variants out of the Adenso waferhandling systems:
WHM-VAC wafer handling modules
Handling module consisting of a central vacuum chamber with an integrated wafer handling robot WHR-VAC.
WHM-VAC-4PS
Module with up to 4 process stations.
WHM-VAC-6PS
Module with up to 6 process stations.
WHM-VAC-8PS
Module with up to 8 process stations.
DTS 200/300/450 – Device Test System (Datasheet.pdf)
Excellently suited for 200/300/450 mm wafers in combination with all types of test applications in inert gas environments (glovebox),
e.g. SURAGUS non-contact in-line measurement solution for sheet resistance [Ohm/sq] and metal layer thickness [nm, µm]
DTS special/glovebox (Datasheet.pdf)
Applications with special substrates, e.g. rectangular glass plates. Customer-specific CASSETTE LIFTS. Glovebox integration as standard.
Pre- and Post-Processing.Modulefor every substrate size
COOLING.Module: Cooling of substrates after thermal processes
HEATING.Module: Heating up substrates as process preparation
FIVE REASONS for choosing Adenso wafer handling
1. RANGE
2. CARRYING CAPACITY
3. BYPASS VALVES
4. SETUP AREA
5. COMPLEXITY
6. SYSTEM
7. SOFTWARE
Your business:
Research and production:
• material research
• layer development
• semiconductors
• sensor systems
• optics
Simply use the ROBOT.Configurator to find the right Cluster.Platform
With the new ROBOT.Configurator, Adenso offers the solution for configuring individual cluster platforms according to application requirements.
The desired system grows in three dimensions and comes at the end with a detailed summary of all parameters as a PDF.
Adenso customers can now configure a wide variety of platform variants easily, quickly and flexibly. Try it out now!
adControl.Solution – the master interface for all Adenso.Products:
• adControl the Master interface for Adenso Systems and Waferhandling Equipment
• Modular & stand-alone central handling system
• Vacuum process control
• Recipe management
• Visualisation
• Scheduler and multi-admin
Advanced substrate handling systems for large substrates up to 3 m x 3 m
Adenso Wafer Handling Module WHM MAXX
Advanced substrate handling solutions with ultra-wide range
Adenos Wafer Handling Module WHM ultra
Advanced handling equipment for substrates, carriers, magazines
Adenso DTS220X TESTER
Adenso.Solutions
Wafer&Cluster.Products
+49 351 79 59 79 70
E-mail: info(at)adenso.de
Adenso Industrial Services GmbH
Adenso GmbH
Am Weiher 3
OT Boxdorf / Dresden
01468 Moritzburg
Germany
adenso gmbh
Adenso GmbH
Adenso GmbH
Adenso GmbH
Adenso GmbH
Adenso GmbH
Adenso
adenso