Waferhandling systems
Waferhandling equipment
Wafer handling systems
Wafer handling equipment

Adenso.Wafer Handling Robot (WHR)

The linchpin in Adenso wafer handling systems

Wafer handling robot: basic versions

Wafer handling robot (WHR)

The Adenso.WHR-VAC wafer handling robot is optimised for maximum carrying capacity and long ranges. The simple arm geometry allows for small gate valves and compact handler swivel ranges. The Adenso.WHR is designed for handling tasks in the field of vacuum robotics (VacBot), with sensitive and large-format substrates such as glass and FPD (flat panel display). Also available as a glovebox version and in full stainless steel design.

Adenso.WHR wafer handling robots are available in the following basic versions: (Datasheet.pdf)

WHR-LARGE
Suitable for all applications in vacuum environments and gloveboxes with high requirements in terms of range and carrying capacity.

WHR-EXTRA LARGE
Applications with increased requirements in terms of range.

Example: TRIAX-Modulim SCOUT 300triax from Ortner Dresden.

WHR-ULTRA LARGE
Up to 3 times the range of familiar solutions.

Example: Adenso DTS Device Test System for 100/200/300/450 mm wafers, suitable for high-vacuum and glovebox inert gas environments.

ROBOT.Configurator

WHM process chambers

Load modules

Wafer handling robot detail variants

Adenso wafer handling robot (WHR) DETAIL VARIANTS out of the waferhandling systems

WHR-VAC wafer handling robot – VACUUM
Wafer handling robot for maximum carrying capacity + precision in vacuum environments.
Substrates: wafers, carriers, glass substrates, FPD (flat panel display), PCB, ….

WHR wafer handling robot – ATMOSPHERE
Wafer handling robot for maximum carrying capacity + precision in atmospheric and shielded environments (glovebox).
Substrates: wafers, carriers, glass substrates, FPD (flat panel display), PCB, ….

WHR-VAC – SPECIAL
– full stainless steel design (vacuum side)
– extra-long X ranges of motion (SE – STROKE EXTENSION)
– high loads
> Customer-specific designs of the handling robot – get in touch with us!

WHR-VAC – ULTRA HIGH-LOAD VERSION
High-load version for active carrier systems with a carrying capacity of up to 250 kg.

WHR-VAC – basic module
Basic module as an OEM product for integration into your application.

WHR-VAC – X-AXIS
X-axis with customer-specific design (inside the vacuum).
Stroke range adapted to the handling task.
Full stainless steel design available.
Adaptation for EE end-effectors

WHR-EE – end effector
End effectors, designed for the task-specific substrate carriers.
All geometries. All materials.

FIVE REASONS for choosing Adenso wafer handling robots (VacBots)

1. RANGE
Adenso.Solution: greatest ranges = maximum flexibility!

2. CARRYING CAPACITY
Adenso.Solution: maximum carrying capacity = unlimited substrate selection!

3. BYPASS VALVES
Adenso.Solution: lean kinematics = extremely small bypass valves!

4. SETUP AREA
Adenso.Solution: space-saving kinematics = minimum setup area!

5. COMPLEXITY
Adenso.Solution: simple setup = saves investment and operating costs!