Project Report: Adenso as a Partner in the Research Industry

at our long-time partner HZDR Innovation GmbH, Dresden-Rossendorf

“Wafers with high-energy ion implantation”

Adenso supplies products and expertise that are used right on site for the latest technology and for worldwide production later on.
A 60 sq m Adenso cleanroom with cleanroom class ISO6 (5) is currently being installed and commissioned.
The process chamber with the Adenso WHM wafer handling module has been delivered and commissioning on the beamline has started. Functions are being tested, the processes are being started up step by step and production is also starting up. In a few weeks, there will be an Adenso DTS220X Device Tester Sorter in the cleanroom that will re-sort the wafers automatically in order to display a potential throughput.

The new research system consists of the following Adenso products:

The implanter module consists of a standard handling module from the WHM230 series and a customer-specific process module.
The implanter module and the sorter are each equipped with Adenso system control, which features a clearly arranged and easy-to-operate user interface and visualisation (HMI).

Adenso has already implemented more than 300 projects with success and delivered more than 80 WHR wafer handling robots, predominantly for the production of semiconductors.

Your contact person and expert at Adenso:
Uwe Beier, CEO
Tel: +49 351 79 59 79 7-0

German Pressrelease Sächsische Zeitung, 27.09.2018


HZDR Innovation GmbH was founded by the Helmholtz-Zentrum Dresden-Rossendorf (HZDR) and GWT-TUD GmbH with the aim of making the best possible use of the existing infrastructures at the HZDR, some of which are unique in the world. HZDR Innovation GmbH uses the equipment and technologies in the ion beam centre to make the base materials more resistant, durable and efficient through ion implantation.

“The ion beam centre is increasingly being used for industrial orders from medical technology, the semiconductor and automotive industries and is thus one of the most important international user centres,”

said Prof. Andreas Kolitsch, CEO of HZDRi.