Waferhandling.Product
WHM330X4 | WaferHandlingRobot with 4 end-effectors
WHM330X4 WaferHandlingRobot with 4 end-effectors
For greatest productivity and flexibility
Adenso.Advantages:
PERFORMANCE up to 4 pcs. of endeffectors (!) allow highest thruput
FLEXIBILITY using WAFER, CASSETTES, CARRIERS with the same setup
RANGE Largest travel ranges = maximum flexibility.
Specification
WORKING RANGES
X: up to 2m
Z: 0, 50, 100, (opt. …500) mm
PAYLOAD
starts from 1 kg up to 25 kg
CLEAN ROOM
clean room suitability
up to ISO class 3 / US FED class 1
SAFETY
SBC safe brake control
STC safe tension control
VAKUUM RANGE
base press.: 5x 10-7 mbar
opon: double sealing
INTERFACES
Ethernet, EtherCAT, Profibus
