Wafer&Cluster.Product
Adenso.Contact
+49 351 79 59 79 70
E-mail: info(at)adenso.de
Adenso Industrial Services GmbH
Adenso GmbH
Am Weiher 3
OT Boxdorf / Dresden
01468 Moritzburg
Germany
Adenso Wafer Handling Module MAXXX
Advanced substrate-handling solutions for large substrates of up to 3 m x 3 m
WHM MAXXX Big-format substrate handling
- designed specially for large-format substrates up to approx. 3 m x 3 m
- extremely long ranges
- extremely precise kinematics
- suitable for vertical substrate handling
