WHM MAXXX | Wafer Handling Module

Adenso Wafer Handling Module MAXXX

Advanced substrate-handling solutions for large substrates of up to 3 m x 3 m

WHM MAXXX Big-format substrate handling

  • designed specially for large-format substrates up to approx. 3 m x 3 m
  • extremely long ranges
  • extremely precise kinematics
  • suitable for vertical substrate handling