WAM300 WaferAlignmentModule for vacuum environment

For automatic wafer alignment within the vacuum environment.

Adenso.Advantages:

INTEGRABLE easy integration into cluster systems

FLEXIBILITY different substrate sizes and gemometries

PRODUCTIVITY fast alignment

PRESISION precise Adenso DDU direct drive unit

COMPLEXITY save invest and operating costs with Adenso.Solutions

The blue Adenso.Solution

SMART with a small footprint and a lot of advantages for Adenso.Clients

For alignment of 300mm wafer inside cluster systems directly and without (!) atmospheric
handling robots. The WAM300 is excellent for combination with Adenso WHR WaferHandlingRobot – via interface the robot gets automatically the correction data from the WaferAlignment Module.

FOOTPRINT Saves cleanroom floor space because of direct integration into vacuum environment.

COSTS Saves investment and operating costs for unnecessary tools.