The Adenso VS200 Vacuum Suitcase is a compact, lightweight, easy-to-use and tightly lockable transport box with an interface to vacuum processing systems.
All types of substrates – round or square, thin wafers or thicker carriers – can be loaded into the vacuum-tight lockable VAC.SUITCASE and transported – while maintaining the necessary vacuum environment. This means that for the first time spatially separate systems can be linked from room to room or worldwide.
Why is the vacuum environment so important for transportation?
Hundreds of process steps are required to manufacture electronic components – almost all of them are technologically highly demanding and can only be carried out successfully in the absence of ambient air, as oxygen and moisture destroy the sensitive layers.
What is the purpose of shipping unfinished semiconductor substrates?
The networked way of working means that information is available worldwide – however, physical resources are mostly localized and only available to a limited extent, and development time is a significant cost factor.
If research teams are now given the opportunity to ship their substrates worldwide without breaking the vacuum and to dock them to other process systems, the possibilities suddenly expand enormously, since the limited equipment on site is no longer decisive for the possibilities and success, but immediately all resources available worldwide for the development of the latest technologies can be included.
New approaches and ideas can be implemented and evaluated in a very short time.
This also opens up completely new possibilities for all research teams to offer their systems technology worldwide as a service – which will certainly lead to a significant increase in the utilization of this equipment, which is good news, not least for our environment
Worldwide docking – how can it work?
There are internationally established interface standards in the semiconductor and vacuum industries. The gate valves from the company VAT, which meet the SEMI requirements, have established themselves as the global standard for vacuum systems.
Since the VAC.SUITCASE is connected via an adapter plate, different gate valves can also be used here – by using a suitable adapter plate.
The possibilities for research teams and projects are enormously expanded with this transport technology – we will be happy to help you coordinate and put together a suitable configuration for your new, worldwide research network!