Wafer&Cluster.Product
LLM330 | VAC-LoadLockModule
The LLM330 LoadLockModule is a customized designed carrier stocker system for research and production use.
Based on a vertical stroke unit the LLM330 LoadLockModule allows continuous substrate handling for continuous processing.
Cluster systems, equipped with LLM330 Load Lock Module allow fully automated load and unload of a large number of substrates.
Adenso.Advantages
- Newest technologies are built in
- compact and stable design
- low initial costs
- user friendly
- various configuration options
- high reliability
- high productivity
- ready for use at once
- ergonomic design
- assistance by integration into your existing equipment
The LLM-VAC Load Lock Module is a custom-designed carrier stocker system for use in research and production.
Based on a vertical stroke unit, the LLM-VAC Load Lock Module allows continuous substrate handling for continuous processing.
Cluster systems equipped with the LLM-VAC Load Lock Module enable fully automated loading and unloading of a large number of substrates.
Let’s start to lower your production costs together and maximise the return on your assets: Adenso – solutions you need.