For loading 300 mm wafers into cluster systems directly and without (!) atmospheric handling robots
The complete handling module with two FOUP300 VAC.LOADPORT is located inside the area marked in blue.
Current solutions require the entire area marked in grey as well as atmospheric robot handling, which not only takes up space, but involves investment costs and running operating costs.
Adenso.Solution: Smart with a small footprint and a lot of advantages for Adenso clients
- higher productivity
- more space
- optimised costs
- greater flexibility
- progressive products
- new markets
Saves up to 80% of floor space
Saves investment and operating costs for unnecessary tools