Wafer&Cluster.Product
DTS220X | Device Tester Sorter | Carrier and Wafer Sorter | Wafer Stocker |
Technical data
Device Tester Sorter | Carrier and Wafer Sorter | Wafer Stocker |
Operating ranges:
X: up to 1 m
Z: 0.50, 100 mm
R: 360°
Load:
Standard: up to 1 kg | Heavy duty: up to 5 kg
Cleanroom:
Cleanroom suitable up to ISO class 3 / US FED class 1
Optional FFU filter unit for microclimate.
Safety:
Smooth running and STOP control integrated as standard.
Certified safety technology integrated in the moon control system for servo drives:
SBC safe brake control
STC safe tension control
Interfaces:
Ethernet
EtherCAT
Profibus
All Adenso Products are developed and produced by Adenso in Dresden. Made in Sachsen, Germany.
The Silicon Saxony is one of Europe’s most successful trade association for the semiconductor industries.
DTS220X – Device Tester Sorter | Carrier and Wafer Sorter | Wafer Stocker
The DTS machine optimises your substrate handling by automatically sorting substrates from standard and/or customised wafer boxes to special carriers/cassettes/magazines, which are used in high-vacuum and inert gas environments, for example in vacuum cluster systems.
Suitable for substrates up to 200 mm. Flexible combination of different cassette types.
Customised integration of all kinds oft test equipment, such as ID reader, vision systems, alignment.
Productivity: Up to 4 pcs. of end-effectors and up to 6 pcs. of cassette lifts guarantee the highest throughput, e.g. 180 wafers/hour (dep. on meas. time)
Layout: Dimensions of the DTS machine in basic configuration: 2,377 x 1,744 mm
Device Stocker Solutions (WaferStocker | WaferSorter)
Store your substrates within your cleanroom near your process tools!
Adenso.Advantages
CUSTOMISED CASSETTES
Unlimited cassette types = user friendly and versatile.
RANGE
Largest travel ranges = maximum flexibility.
PAYLOAD
Highest load capacity = unlimited substrate choice.
FOOTPRINT
Space-saving kinematics = small setup area.
COMPLEXITY
Keep it simple with Adenso = save space and money!
Adenso