Adenso is expanding the Cluster Robot.Platform and now offers suitable temperature control modules for every substrate size:
COOLING.Module: Cooling of substrates after thermal processes
HEATING.Module: Heating up substrates as process preparation
In many cases, the customer processes require high process temperatures. If the substrates are loaded into the process at no temperature, a heating-up time is required in the main process time – valuable process time is required for this. The same applies to the cooling phase after such high temperature processes.
The HEAT / COOL.modules are simply docked onto the central Robot.Platform. When the Robot.Platform is delivered, the additional modules are already set up, tested and ready to use. These can already be configured with the ROBOT.Configurator. And of course the selected modules are also taken into account in the adControl master interface.