High-flexibility substrate transport and storage system
Use of multi-axis robot units and automatic storage systems

• integration of autonomously operating transport robots (AGV)
• input/output stations
• docking stations
• automatic storage systems
• safety concept

Automatic test and calibration system
fully automatic in-line solution

• workpiece carrier transfer system
• test chamber with special/shielded atmosphere
• temperature control units
• high current test
• carrier identification, data carrier
• database connection

High-productivity robot station
with 2 multi-axis robots

• movement, schedule and collision simulation
• integrated carrier transfer system
• seal application with a multi-axis robot
• assembly process with the other multi-axis robot
• integrated test stations