adLOAD – advanced High Capacity LoadLock.Module
adLOAD complements the product portfolio
Advanced LoadLock.Module serve cluster systems with extreme substrate capacity
adLOAD forms a completely new category of LoadLock.Modules for cluster systems, which is characterized by an unprecedented substrate capacity.
Instead of the previous only 25 wafers per cycle, 30, 40, 50 and more can now be accommodated in a LoadLock – an enormous increase in autonomy time with the same footprint!
All options and combination options known from the VAC.ROBOTICS platform, such as Alignment, multi substrate gripper, temperature control, … are compatible with this series.
As is typical for Adenso, the adLOADs can also be configured for sizes with a substrate size of 200 and 300mm.
Combined with the 7port central platform, it offers future-proof flexibility for all applications.
The Robot.Configurator creates customer-specific systems from the Adenso Cluster.Platform online and thus offers the perfect working level for further implementation.