The new Adenso.Solution will be presented on Semicon 2019 in Munich

adControl – the master interface for all adenso products

In talk with: Uwe Beier, managing director of Adenso

On which competences do our customers wish to focus?

Process technologies and nothing else! This means that our customers need central Robot.Modules to connect process modules in a cluster in order to handle substrates between the processes and to feed them in/out.

What does the ideal central handling module look like from the customer perspective?

It is a fully independent central Cluster.Module with an intuitively operated graphical user interface and all the necessary safety functions.

How can Adenso fulfil this customer requirement?

This is why we developed the modular Adenso Robot.Platform. The Robot.Modules are modularly configured in an application-specific manner – almost as easily as creating something with certain well-known toy bricks! The equally modular Cluster.Control system adControl is responsible for the entire control of the central handling module.

How is a Robot.Cluster for vacuum processes created?

The process provider has the technologies and devises a configuration for its customer. Adenso selects a suitable Robot.Platform and the necessary Robot.Modules and configures a Robot.Cluster together with the adControl. The communication between the Handling.Robot and the Process.Modules takes place via the adControl.Interface and in a simple and equally modular manner.

How long does the basic commissioning of Handling.Robots and Process.Modules take?

Since all systems are commissioned in parallel and independently of one another and the interface can be tested in advance, the basic commissioning of even extensive cluster systems is generally completed within just one day. The process can then be commissioned immediately.

What is the sales concept behind adControl?

Since we use a licensing model for adControl, our customers don’t need to pay for the entire software development for each project. This means significant savings in terms of time (because it’s a ready-made standard product) and costs (just the licence fee).

Modular & stand-alone central handling system,
with vacuum process control,
recipe management, visualisation,
scheduler and multi-admin to handle with all Adenso systems

adControl is no beta, adControl is already implemented in clients production environments

Screenshots of configuration examples from Robot.Platform and R2R winding systems

adControl Configuration example

of a central handling module WHM with a LoadLockModule LLM (blue)
and potential customer process modules PCS (red)

All the TASKS for Implementation and Production can be defined, commissioned and realised independently of each other and of the client’s Process Control System

The basic commissioning of even extensive cluster systems generally takes place within just one day. The process can then be commissioned immediately.


• Stand-alone system
• Control hardware and software
• Scheduler (substrate tracking recipes)
• Operator administration
• Visualisation / multi touch display

contains vacuum components, pneumatics, …
• WHM-VAC (wafer handling module)
• LLM-VAC (load lock module)
Process-independent commissioning


• Process technology
• Ideally stand-alone solutions
• Ideally one PLC per process module
Handling-independent commissioning


Operated by customer as stand-alone version or by Adenso as an option: integrated into adControl visualisation (customised solution)


CLUSTER (general, substrates, safety, …)
Basic commissioning together within a short timeframe as a basis for process commissioning by the customer